In-situ Deposition Monitoring Tools from k-Space Associates

 

Thin Film Metrology

k-Space is a leading manufacturer of in situ, in-line, and ex situ thin film metrology tools designed to improve processes and increase profitability. Our thin film metrology tools are used to monitor nearly all thin-film deposition processes, including MBE, MOCVD, PLD, PVD, sputtering, and evaporation, as well as production. Our products utilize optical imaging technology for non-contact, non-invasive measurement of a plethora of important parameters such:

 

• Wafer and film temperature

• Thin-film stress and strain

• Wafer curvature, bow, and tilt

• Surface roughness and quality

• Film thickness and deposition rate

• Optical band gap

• Atomic spacing

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Glass Inspection

The glass industry has its own unique set of requirements that k-Space’s glass metrology can accommodate. There are needs for edge inspection, broken glass detection, glass thickness calculation, as well as film thickness, spectral reflectance, absorption, color (L*a*b*) measurement, to name some of the metrology needs. For every panel.

Using state-of-the-art lasers, light sources, machine vision technology, and other tools, our product engineers, software engineers, and physicists can develop a automated visual inspection solution that measures your specific need for glass inspection. This leads to better quality control, which in turn leads to happier customers, and improved yield.