In-situ Deposition Monitoring Tools from k-Space Associates, Delcom, and Telemark

 

Torvac provides in situ, in-line, and ex situ metrology tools for the semiconductor, glass coating, and optical components industries.  Measure important thin-film properties in real time, or offline:

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• Temperature 

• Film Thickness and Deposition Rate

• Index of Refraction (n)

• Thin-film Stress and Strain

• Surface Roughness and Surface Quality

• Emmissivity

• Electrical Resistance

• ​Yxy, Lab, or LCH color values