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In-situ Deposition Monitoring Tools from k-Space Associates, Delcom, and Telemark


Torvac provides in situ, in-line, and ex situ metrology tools for the semiconductor, glass coating, and optical components industries.  Measure important thin-film properties in real time, or offline:

  • Temperature 

  • Film Thickness and Deposition Rate

  • Index of Refraction (n)

  • Thin-film Stress and Strain

  • Surface Roughness and Surface Quality

  • Emmissivity

  • Electrical Resistance

  • Yxy, Lab, or LCH color values

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